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Intelligent Cryopump Systems

 On-Board IS cryopump systems leverage Brooks' new high-efficiency cryogenics technology to provide unparalleled vacuum performance and energy efficiency and  is the new world standard in cryogenic vacuum technology,

  • Patented distributed control system monitors and constantly adjusts individual elements of the cryopump system to maintain optimal system-wide vacuum performance, delivering exceptional process consistency.
  • Quickest regenerations in single and multipump configurations.
  • Lowest consumption of energy and cooling water of any CTI-Cryogenics cryopump system — with no compromise in vacuum performance.
  • Easiest system integration and fastest production installation.
  • Enhanced GOLDLink® capability enables enhanced remote monitoring for both preventive and predictive maintenance.
  • Highest uptime, highest productivity, and lowest overall cost-of-ownership of any cryopump system
  • Backed by legendary Helix service and support, worldwide service.
  • Serviced by Applied Cryogenics, Inc.