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Improve Your Sputtering Process  by Better Water Vapor Pumping

(Cover article of Semiconductor International August 1994)

 


 

On-Board waterpump
On-Board Waterpumps are high performance vacuum pumps, which increase water vapor pumping speed, providing substantially improved system configurations to fit any application. And they provide the field-proven reliability, the process flexibility, and the advanced productivity and performance of CTI-Cryogenics' On-Board family of high vacuum pumps.

Features:

  • 50% to 75% reduction in time to base pressure
  • Higher yields through reduced water vapor and lower contamination.
  • Temperature control for selective water vapor pumping. No gate valve required.
  • Low cost installation and operation. The compressor can be located remotely, with no cold refrigerant lines.
  • Advanced On-Board control system for process optimization and monitoring, predictive maintenance, networked pump management, and ease of use.
  • Compatibility with other On-Board pumps including common user interface, compressor, and communicationsprotocol.