OnBoard
Cryopumps
applied cryogenics supports a broad array of cti cryopump
and cryo pump systems designed to deliver exceptional performance,
reliability and productivity, a veteran owned company providing global
support.
On-Board Pumps use comprehensive microprocessor control in a flexible, modular design (each pump has its own microprocessor control module) to provide real-time vacuum performance optimization for each pump. This allows maximize process tool uptime through fast, microprocessor driven regenerations, and to monitor and stabilize pumping performance with set-point control and monitoring of array temperatures.
History Report
Regen Report
Free download of WINOCC
Note: This will only run with our cable which is availble for $85