Field Service for Semiconductor Systems

Applied Cryogenics brings 25+ years of hands-on experience to every cryopump repair and field service job. Our WinOCC-certified technical field engineers provide comprehensive diagnostics, emergency repairs, and preventive maintenance for CTI cryopumps and helium compressors - without the need to remove equipment from your process tool. We understand that downtime costs money. We're built to minimize it.

Cryo Services
Cryo Services
Sales

It is always important to have spare parts on hand.

Refurbishing

Make your pump or compressor operate like it is new again.

Field Service

Over the Phone and On-site support to keep your pumps and compressors running smoothly.

On Board Services

Using CTI's original WinOCC software, we thoroughly inspect all controls, relays, and I/O points within the On-Board (OB) Controller.

The On-Board Pumps feature advanced microprocessor control in a modular, flexible design, with each pump equipped with its own dedicated control module. This enables real-time optimization of vacuum performance, maximizes process tool uptime through fast, microprocessor-driven regenerations, and allows precise monitoring and stabilization of pumping performance, including set-point control and array temperature management.

Winocc
Winocc

WinOCC

On Board Regen
On Board Regen

History

Cryo Regen
Cryo Regen

Regen Report

QUALITY COMMITMENT

We don't just repair cryopumps - we restore them to meet or exceed OEM specifications.

Rigorous Testing Protocol

24-hour continuous operation test (minimum)

Multiple regeneration cycles under load

Temperature vs. pressure curve analysis (pumpdown curves recorded)

Helium leak testing (mass spectrometer sniff test)

RGA (Residual Gas Analysis) verification if requested

Warranty given with every rebuild

MODELS WE SERVICE

CTI On-Board Cryopumps

OB 4, OB 4F, OB 8, OB 8F, OB 10, OB 10F, OB 250F, OB 400, OB 500

CTI CryoTorr Cryopumps

CT4, CT4F, CT8, CT8F, CT10, CT10F, CT250F, CT400, CT500

CTI Helium Compressors

SC, 8200, 8300, 8500, 8510, 9600, 9700, 1020R

Leybold, Varian, Seiko Seiki, Balzers & Pfeiffer Turbo Pumps

Contact us with your specific model and we can provide a quote

ON-SITE FIELD SERVICE & EMERGENCY SUPPORT

Not every problem requires a depot rebuild. Many issues can be diagnosed and fixed in the field.

What We Offer On-Site

  • Complete system diagnostic (without removing the pump)

  • Coldhead regeneration and optimization

  • Helium line purging and decontamination

  • Oil-vapor trap replacement and absorber servicing

  • Temperature and pressure monitoring setup

  • Design consulting to improve uptime (redundant systems, maintenance intervals, etc.)

Emergency Response

  • Available for rapid response calls (within 24 hours in most cases)

  • We bring common spare parts to minimize tool downtime

  • Field repair is often faster and less expensive than depot service

Why Field Service Matters
When a cryopump underperforms, you don't always need to rebuild it. A contaminated helium circuit, a degraded absorber, or a misaligned regeneration cycle can cause the same symptoms as a failed pump. Our field engineers diagnose the real problem - and often fix it on the spot.

THE APPLIED CRYOGENICS DIFFERENCE

25+ Years of CTI Expertise
We've been working on CTI cryopumps and compressors since before most of our competitors existed. We know these systems at a level that comes from thousands of repairs, not from a manual.

Veteran-Owned & Silicon Valley-Based
We understand precision, reliability, and accountability. Your system's uptime is our responsibility.

WinOCC Certified
Our field engineers are certified on CTI's proprietary On-Board control software. We don't guess at diagnostics - we read real data.

Full Technical Library
We have 30+ years of technical documentation, pumpdown curves, and troubleshooting guides at our fingertips. If something is wrong, we know how to find it.

Get Started

A friendly technician assisting a client with sputtering system details in a bright workshop.
A friendly technician assisting a client with sputtering system details in a bright workshop.

Have a failing cryopump?
Call us at 1-510-252-9900 or email sales@appliedcryogenics.com with:

  • Pump model and serial number

  • Description of symptoms (not cooling, ratchetting, etc.)

  • Your facility and application (semiconductor fab, R&D, etc.)

We'll give you an honest assessment and timeline. No guessing. No surprises.

Contact Us

Support and inquiries welcome anytime.

Email

Phone

sales@appliedcryogenics.com

1-510-252-9900

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